Data for "Microscopy Analysis of Samples Irradiated using 6keV/u slow Au79+ ions at GSI's HITRAP facility" (BSc Thesis)

The work in the course of this thesis was performed by S. Spannagl, supervised by Dr. A. Niggas and Prof.

R.A. Wilhelm. Context and methodology Slow highly charged ion irradiation was perfored at GSI Darmstadt: Au79+ ions at an energy of 6keV/u were supplied by the HITRAP facility and nine samples were irradiated under high vacuum conditions: ionic crystal: CaF2 quasi-freestanding single-, bi- and trilayer graphene (prepared by the Chemnitz University of Technology, group of T. Seyller) TMDCs: MoS2 on SiO2, MoS2 on Au, WS2 on SiO2 (several samples prepared by FSU Jena and University Duisburg-Essen; groups of A. Tuchanin and M. Schleberger) Samples were transferred and imaged at ambient pressures to TU Wien for microscopy analysis including: scanning electron microscopy (SEM) for the graphene-based samples atomic force microscopy (AFM) for all samples confocal microsope (CaF2) CaF2 samples were imaged prior and after etching with HNO3.