Data for Deep three-dimensional solid-state qubit arrays with long-lived spin coherence

However, the best current method for entangling two NV centers requires that each one is in a separate cryostat, which is not scalable. Here we show that single NV centers can be laser-written 6-15 µm deep inside of a diamond with spin coherence times that are an order of magnitude longer than previous laser-written NV centers and at least as long as naturally-occurring NV centers.

This depth is suitable for integration with solid immersion lenses or optical cavities and we present depth-dependent T2 measurements. 200,000 of these NV centers would fit into one diamond.<br><br>Data is organised in 3 folders: before-annealing, after-annealing and processing:- before-annealing contains data from before the diamond was annealed after-annealing contains data from after the 3h 1000C anneal Below these levels the data is divided by pitch (2um, 3um, 5um) and by array as labelled in the map in the SI.