Data · dataset · 2026
Atomic Scale Investigation on Nano Adhesive Contact Characteristics and Generation Mechanism for Single Crystal Si Surface with Graphene Films
Listed in ScienceDB
In response to the problems of poor durability, low reliability and short service life of products caused by adhesive wear and adhesive contact failure between two contact surfaces of semiconductor silicon materials in micro/nano-electromechanical systems.
Description
Thus, understanding the adhesive contact characteristics of silicon surfaces from an atomic perspective and suppressing the generation of adhesive effects will promote the improvement of interface contact performance for silicon devices.
Based on this, the nanoindentation method of classical molecular dynamics method was used to systematically analyze the differences in adhesive contact behavior, shear deformation, atomic displacement amplitude, stress distribution, dislocation, surface morphology, and the number of adhered atoms under Si surface with graphene layers, extreme service temperatures, and different bonding energy coefficients on film-substrate interface.
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This research reveals the generation mechanism of adhesion during contact process. The results show that the graphene layer numbers on Si surface are positively correlated with load-bearing capacity improvement of mechanical properties for Si substrate. Additionally, with graphene layer numbers increase, an anti-adhesion effect occurs on Si devices surface.
That is, Compared with numbers of silicon substrate with coated graphene layers, the numbers of adhesive contact atoms are reduced by 3.47 times than pure Si, it improves the interface contact performance significantly. The adhesive mechanism of graphene-coated films on Si is that high stress is concentrated on closely contact area between tip and Si substrate, which intensifies the strain localization degrees, resulting in the damage of the bond energy of silicon-silicon atoms and generating an adhesive effect.
Furthermore, as numbers of graphene layers increases, the distribution of stress concentration on closely contact area decreases, and the adhesion effect weakens accordingly. However, as the service temperature increases from extremely low to high, the adhesion effect gradually intensifies. The research also indicates that the higher the binding energy coefficient, the stronger the Si device with load-bearing capacity.
However, during loading, the amplitude of shear deformation and atomic displacement on closely contact area becomes more intense, and the adhesion effect becomes more prominent.
Links
Where it is published
- DOI doi.org/10.57760/sciencedb.011y0 ↗
DOI / persistent id · from scidb cn
Catalogue records · 1
- OAI-PMH record scidb.cn/oai?verb=GetRecord&metadataPrefix=oai_dc&identifier=10.57760%2… ↗
metadata API · from scidb cn
Topics
- From keywords
- Earth & Environmental Science · Engineering · Humanities · Life Sciences · Social Science
- Inferred from text
- Nanotechnology 73%
Provenance · 1 source records, 10 field assertions
| Source | Key | Last seen | Raw |
|---|---|---|---|
| ScienceDB | 10.57760/sciencedb.011y0 | 12 d ago | JSON v1 |
| Field | Assertion | Extractor | Evidence |
|---|---|---|---|
| concepts[field].anzsrc:group:4018 | enrichment · scidb cn | taxonomy-embedding@1.0.0 | title+keywords+description (73%) |
| concepts[field].local:field:earth-environmental | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:engineering | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:humanities | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:life-sciences | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:social-science | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| description | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/description |
| license_text | source · scidb cn | connector:scidb_cn@1.0.0 | |
| publication_date | source · scidb cn | connector:scidb_cn@1.0.0 | |
| title | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/title |