Data related to the study of nano-absorbing precursors in picosecond laser damage by comparing HfO2/SiO2 and Ta2O5/SiO2 high-reflectivity coatings

Transmittance spectra of HfO2/SiO2 and Ta2O5/SiO2 high-reflectivity coatings at an incidence angle of 45°; schematic diagram of the damage test platform; damage probability curves and damage threshold data of HfO2/SiO2 and Ta2O5/SiO2 HR coatings; SEM images of damage patterns of HfO2/SiO2 and Ta2O5 HR coatings; SEM images and profiles of Ta2O5/SiO2 SEM images and profiles of pinpoints in the HfO2/SiO2 coating; SEM images and profiles of flat-bottom pits; SEM images and profiles of funnel pits; SEM images of electric field intensity distribution and depth of pinpoints; XPS test results; TOF-SIMS test results; SEM images of picosecond laser damage in monolayer SiO2 coatings; local features of funnel pits; analysis of damage formation process Schematic diagram; TEM images of the cross-section of the high-reflectivity coatings.