Experimental results of polishing pads made of different materials under different parameters

However, the generation mechanism of the MSF error is still not fully clarified, which seriously affects the further improvement of optical component performance. In this paper, it is proved that the actual contact pressure distribution between the workpiece and tool is a crucial source which affects the MSF error characteristics.

A rotational periodic convolution (RPC) model is proposed to reveal the quantitative relationship among the contact pressure distribution, speed ratio (spin velocity/feed speed) and MSF error distribution. In-depth analyses show that the MSF error is linearly related to the symmetry level of contact pressure distribution and inversely proportional to the speed ratio, where the symmetry level is effectively evaluated by the proposed method based on Zernike polynomials.