Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry"

The provided data set and simulation software enables the immediate replication of the results presented in "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry." The research data are structured with respect to the figures presented in the contribution. Each subfolder contains all necessary measurement or simulation data to receive the figure from the contribution by running a MATLAB file.

Therefore, it is possible to compare the results with full context to those presented in the contribution. The simulations demonstrate the transition of radial displacement uncertainties in an annular subaperture stitching interferometer through surface stitching algorithms to the topography result. The comparison of the simulation and measurement results indicates, that the radial displacement errors are the dominant source of topography deviations.