S-parameters of TSV samples under gamma-ray irradiation

The dose levels were set at 60, 120, and 180 krad(Si). All TSV samples were irradiated without any applied bias.

A total of 27 samples were prepared, with nine samples allocated to each of the three TSV types (labeled A1# – A9#, B1# – B9#, and C1# – C9#). For each TSV type, three samples were irradiated at each dose level.The three files s1_cs.txt, s2_cs.txt, and s3_cs.txt correspond to the experimental data for the three samples in the paper. In the .txt files, the first column is frequency; columns 2 and 3 contain the S21 phase and magnitude at 0 kHz; columns 4 and 5 contain the S21 phase and magnitude at 60 kHz; columns 6 and 7 contain the S21 phase and magnitude at 120 kHz; and columns 8 and 9 contain the S21 phase and magnitude at 180 kHz.