Dataset of Metal–Insulator–Metal Few-Layer Metasurfaces for Inverse Design of Tailored Chiral Structural Colors

Each metasurface consists of an unpatterned aluminum layer, a SiO₂ spacer layer, and a patterned aluminum nanostructure layer. The dataset was generated using numerical simulations based on the finite integration technique (FIT) method and includes structural parameters, reflection coefficients, reflection spectra, circular dichroism spectra, interpolated spectra, and the corresponding colorimetric information, including CIE 1931 XYZ tristimulus values and RGB values under a D50 standard illuminant with a 2° standard observer.

The chiral structural color distributions under left- and right-handed circularly polarized illumination are also provided in the CIE 1931 chromaticity diagram. This dataset establishes a comprehensive mapping between the structural configurations of few-layer metasurfaces and their chiral color responses, providing a valuable resource for developing machine-learning models for optical response prediction and inverse design of few-layer metasurfaces with tailored chiral structural colors.