Data · dataset · 2025
Toward Scalable Manufacturing of Doped Silicon Nanopillars for Thermoelectrics via Metal-Assisted Chemical Etching - Data
Listed in Bicocca Open Archive Research Data
These data are part of a systematic study on the localized and non-localized etch rates of silicon nanopillars produced using Metal-Assisted Chemical Etching (MACE) for thermoelectric applications.
Description
Specifically, they represent a collection of etch rates as a function of doping level for both p-type and n-type silicon, using both 1-pot and 2-pot MACE processes. Data are available in both .csv and .xlsx format.
Links
Where it is published
- DOI doi.org/10.17632/bk82wc727y.1 ↗
DOI / persistent id · from board unimib it
Catalogue records · 1
- OAI-PMH record board.unimib.it/oai?verb=GetRecord&metadataPrefix=oai_dc&identifier=oai%3Aboar… ↗
metadata API · from board unimib it
Topics
- From keywords
- Earth & Environmental Science · Engineering · Humanities · Life Sciences · Social Science
- Inferred from text
- Nanoelectromechanical systems 78%
Provenance · 1 source records, 11 field assertions
| Source | Key | Last seen | Raw |
|---|---|---|---|
| Bicocca Open Archive Research Data | oai:board.unimib.it/bk82wc727y.1 | 11 d ago | JSON v1 |
| Field | Assertion | Extractor | Evidence |
|---|---|---|---|
| access_level | source · board unimib it | connector:board_unimib_it@1.0.0 | |
| concepts[field].anzsrc:field:401803 | enrichment · board unimib it | taxonomy-embedding@1.0.0 | title+keywords+description (78%) |
| concepts[field].local:field:earth-environmental | mapping · board unimib it | connector:board_unimib_it@1.0.0 | |
| concepts[field].local:field:engineering | mapping · board unimib it | connector:board_unimib_it@1.0.0 | |
| concepts[field].local:field:humanities | mapping · board unimib it | connector:board_unimib_it@1.0.0 | |
| concepts[field].local:field:life-sciences | mapping · board unimib it | connector:board_unimib_it@1.0.0 | |
| concepts[field].local:field:social-science | mapping · board unimib it | connector:board_unimib_it@1.0.0 | |
| description | source · board unimib it | connector:board_unimib_it@1.0.0 | /metadata/dc/description |
| license | source · board unimib it | connector:board_unimib_it@1.0.0 | /metadata/dc/rights |
| publication_date | source · board unimib it | connector:board_unimib_it@1.0.0 | |
| title | source · board unimib it | connector:board_unimib_it@1.0.0 | /metadata/dc/title |