Reflection ptychography Siemens star soft X-ray dataset

Through this imaging mode, we address the limitations of traditional transmission geometries, which restrict the analysis of thicker or bulk samples in the soft X-ray range. Our dataset includes high-resolution images obtained from a lithographically defined Siemens star and barcode test pattern on a multilayer substrate, demonstrating a full-pitch resolution of ~45 nanometers confirmed through Fourier ring correlation analysis.

Additionally, this dataset contains the layout file and Jupyter notebook used to simulate the anisotropic blurring of our tilted resolution test sample as described in our paper. This dataset provides a foundational resource for researchers interested in nondestructive X-ray imaging techniques and extends the capabilities of soft X-ray studies beyond the constraints of transmissive sample preparation.