Preliminary Exploration and Machine Learning Analysis of Growth Process Parameters for YBa₂Cu₃O_{7−δ} Thin Films Based on Small‑Sample Data

The covered process parameters include substrate type, substrate size, laser focal length, target-substrate distance, output voltage, laser frequency, oxygen pressure, growth time, and substrate temperature. The structural indicators include the (005) peak position and the full width at half maximum (FWHM) of the rocking curve, both measured by X‑ray diffraction (XRD).

The dataset consists of four CSV files: numeric_peak_position_train and numeric_peak_position_eval for the training and test sets of the (005) peak position, and fwhm_interpolation_train and fwhm_interpolation_eval for the training and test sets of the FWHM. Each file contains the associated growth parameters and characterization data.